[초록]광화학유기금속 증착에 의한 패턴 박막 코팅연구_연세대학교 박형호 교수 > IACC 2016

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참고자료 | [초록]광화학유기금속 증착에 의한 패턴 박막 코팅연구_연세대학교 박형호 교수

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작성자 최고관리자 작성일18-01-10 10:29 조회658회 댓글2건

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박막의 소자응용을 위해서는 패턴 과정이 필요하나 이 과정중 박막의 특성은 손상을 받을 수 있다.

 

광화학 유기금속 증착(PMOD)에 의한 직접 패턴 방식은 광민감 출발 물질을 사용하기 때문에

포토레지스트나 건식식각이 필요없는 새로운 코팅 공정이다.

본 발표에서는 PMOD 방식이 조성의 조절이 용이하고 추가적인 식각공정이 필요없는 마이크론

크기의 패턴을 형성할 수 있는 박막의 코팅법임을 소개한다.

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

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